General FIB Book References
- Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice
Lucille A. Giannuzzi, Fred A. Stevie - High Resolution Focused Ion Beams: Fib and Its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
Jon Orloff, Lynwood Swanson, Mark Utlaut - Focused Ion Beam Systems: Basics and Applications
Nan Yao - Introduction to Focused Ion Beam Nanometrology
David C Cox
Important Articles
- “Roadmap for focused ion beam technologies“; Katja Höflich, et al.;
Appl. Phys. Rev. 10, 041311 (2023)
https://doi.org/10.1063/5.0162597 - Article 2